Vista normal Vista MARC Vista ISBD

Extreme ultraviolet lithography / [edited by] Banqiu Wu, Ajay Kumar - 1 online resource (various pagings) : illustrations (some color)

Includes bibliographical references and index.

ISBN: 9780071549189 (alk. paper) 0071549188 (alk. paper)

LCCN: 2009002187

Subjects--Topical Terms:
Litografía
Circuitos integrados--Máscaras (Electrónica)
Circuitos integrados--Diseño y construcción

Dewey Class. No.: 621.381531